US Patent Issued to Taiwan Semiconductor Manufacturing on Aug. 12 for "Micromechanical arm array with micro-spring structures in micro-electromechanical system (MEMS) actuators" (Taiwanese Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,388,376, issued on Aug. 12, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Micromechanical arm array with micro-spring structures in micro-electromechanical system (MEMS) actuators" was invented by Yu-Hsun Li (Yunlin County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "MEMS actuators having micro spring structures and methods of fabricating the same are provided. An example MEMS actuator includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arm...