ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,923, issued on Aug. 12, was assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. (Hsinchu, Taiwan).
"Analyzing method" was invented by Pradip Girdhar Chaudhari (Hsinchu, Taiwan), Che-Hui Lee (Taipei, Taiwan) and Wen-Cheng Yang (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes providing a jig including a predetermined center and a magnetron installed on the jig; rotating the magnetron and obtaining a measured first magnetic flux density at the predetermined center of the jig; defining a first area of the magnetron based on the measured first magnetic flux density; rotating the magnetron and measuring a plurality...