US Patent Issued to Taiwan Semiconductor Manufacturing on April 29 for "Wafer process monitoring system and method" (Taiwanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,703, issued on April 29, was assigned to Taiwan Semiconductor Manufacturing Co. Ltd. (Hsinchu, Taiwan).

"Wafer process monitoring system and method" was invented by Ming-Sung Hung (Hsinchu, Taiwan), Chia-Lun Chen (Hsinchu, Taiwan) and Cheng-Hao Kuo (Hsinchu, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a system and method for determining condition of wafers during processing of the wafers. The system and method include detecting vibrations of a wafer transfer robot, generating signals based upon the vibrations, and processing the signals for determining a condition of the wafers held by the wafer transfer robo...