US Patent Issued to T-Robotics on Oct. 14 for "Travel robot for moving substrate transfer robot in vacuum chamber" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,641, issued on Oct. 14, was assigned to T-Robotics Co. Ltd. (Osan-si, South Korea).

"Travel robot for moving substrate transfer robot in vacuum chamber" was invented by Soo Jong Lee (Suwon-si, South Korea), Myung Jin Kim (Pyeongtaek-si, South Korea), Chang Seong Lee (Hwaseong-si, South Korea), Seung Young Baek (Osan-si, South Korea), Chang Hyun Jee (Anyang-si, South Korea), Sang Hwi Ham (Gunpo-si, South Korea), Moon Gi Hur (Suwon-si, South Korea), Jae Hyun Park (Osan-si, South Korea) and Tae Han Lee (Yangju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A travel robot for moving a substrate transfer robot in a vacuum chamber, include...