US Patent Issued to T-Robotics on March 18 for "Apparatus for transferring substrate in vacuum chamber" (South Korean Inventors)

ALEXANDRIA, Va., March 19 -- United States Patent no. 12,255,090, issued on March 18, was assigned to T-Robotics Co. Ltd. (Gyeonggi-do, South Korea).

"Apparatus for transferring substrate in vacuum chamber" was invented by Soo Jong Lee (Suwon-si, South Korea), Chang Seong Lee (Hwaseong-si, South Korea), Chang Hyun Jee (Anyang-si, South Korea) and Sang Hwi Ham (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transfer apparatus that transfers a substrate in a vacuum chamber is provided. The substrate transfer apparatus includes: an elevating robot, a travel robot, and a substrate transfer robot. The travel robot includes: (i) a travel arm, through which a b1-st vertical through-ho...