US Patent Issued to T-Robotics on April 15 for "Substrate transfer robot for transferring substrate in vacuum chamber" (South Korean Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,132, issued on April 15, was assigned to T-Robotics Co. Ltd. (Osan-si, South Korea).

"Substrate transfer robot for transferring substrate in vacuum chamber" was invented by Soo Jong Lee (Suwon-si, South Korea), Chang Seong Lee (Hwaseong-si, South Korea), Seung Young Baek (Osan-si, South Korea) and Moon Gi Hur (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, each compartmentalized into a lower and an upper space, wherein link connecting members with blades are engaged at front and rear areas of the ...