US Patent Issued to SYSKEY TECHNOLOGY on April 29 for "Multi-chamber semiconductor manufacturing system" (Taiwanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,701, issued on April 29, was assigned to SYSKEY TECHNOLOGY Co. LTD. (Hsinchu County, Taiwan).

"Multi-chamber semiconductor manufacturing system" was invented by Hsueh-Hsien Wu (Hsinchu, Taiwan), Chih-Yuan Chan (Hsinchu County, Taiwan) and Yi-Ting Lai (Hsinchu County, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-chamber semiconductor manufacturing system is provided, including: a base, a plurality of processing units and a transfer unit. The base includes a main body and a plurality of supporting frames protrudingly disposed on a mounting surface of the main body. The plurality of processing units are connected to the plurality of sup...