ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,518, issued on Oct. 7, was assigned to SUZHOU HUNTERSUN ELECTRONICS Co. LTD. (Suzhou Nano, China).
"Bulk acoustic wave resonator and fabrication method therefor" was invented by Ming Wu (Suzhou Nano, China), Zhaoyun Tang (Suzhou Nano, China), Qinghua Yang (Suzhou Nano, China), Zhiguo Lai (Suzhou Nano, China) and Jiayou Wang (Suzhou Nano, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "A BAW resonator includes: a piezoelectric film array, including multiple piezoelectric films between a substrate of a chip and a capping layer on the top, where multiple first cavities are provided between adjacent piezoelectric films in a vertical direction, betwe...