US Patent Issued to STMICROELECTRONICS on June 17 for "Micro electro mechanical system and manufacturing method thereof" (Italian Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,336,432, issued on June 17, was assigned to STMICROELECTRONICS S.r.l. (Agrate Brianza, Italy).

"Micro electro mechanical system and manufacturing method thereof" was invented by Gianluca Longoni (Cernusco sul Naviglio, Italy) and Luca Seghizzi (Milan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS device is provided that includes a semiconductor substrate including a main surface extending perpendicular to a first direction and a side surface extending on a plane parallel to the first direction and to a second direction that is perpendicular to the first direction. At least one cantilevered member protrudes from the side surface of the semiconduct...