US Patent Issued to STMicroelectronics on Dec. 9 for "Microelectromechanical mirror device with piezoelectric actuation having improved stress resistance" (Italian, American Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,180, issued on Dec. 9, was assigned to STMicroelectronics S.r.l. (Agrate Brianza, Italy).

"Microelectromechanical mirror device with piezoelectric actuation having improved stress resistance" was invented by Nicolo' Boni (Mountain View, Calif.), Roberto Carminati (Piancogno, Italy), Massimiliano Merli (Pavia, Italy), Carlo Luigi Prelini (Seveso, Italy) and Tarek Afifi Afifi (Milan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main ex...