ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,030, issued on Oct. 14, was assigned to STANLEY ELECTRIC Co. LTD. (Tokyo).
"MEMS device" was invented by Takeshi Sasaki (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A light deflector includes: a conductor layer formed as an integral layer on an SOI oxide film layer; a piezoelectric element having an upper electrode, a piezoelectric film, and a conductor layer serving as a lower electrode; an interlayer insulating film covering the conductor layer and the piezoelectric element from the surface side; a plurality of wirings formed on the surface of the interlayer insulating film in such a manner as to extend in the region of the surface of the...