US Patent Issued to Solmics on Jan. 20 for "Manufacturing method of ring-shaped element for etcher" (South Korean Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,531,214, issued on Jan. 20, was assigned to Solmics Co. Ltd. (Pyeongtaek-si, South Korea).

"Manufacturing method of ring-shaped element for etcher" was invented by Sung Sic Hwang (Seoul, South Korea), Jae Bum Lee (Pyeongtaek-si, South Korea), Jun Rok Oh (Seoul, South Korea), Kyoung Yeol Min (Yongin-si, South Korea), Kyung In Kim (Hwaseong-si, South Korea) and Jung Kun Kang (Pyeongtaek-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A manufacturing method of a ring-shaped element for an etcher, comprises a granulation operation comprising i) a slurry manufacturing process of preparing a slurry by mixing a raw material including boron carbi...