US Patent Issued to Solayer on July 22 for "Diaphragm assembly for delimiting the coating region of a sputter source, and sputtering device" (German Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,365,978, issued on July 22, was assigned to Solayer GmbH (Karlstein, Germany).

"Diaphragm assembly for delimiting the coating region of a sputter source, and sputtering device" was invented by Dzmitry Hrunski (Aschaffenburg, Germany), Markus Kress (Muhlheim am Main, Germany), Marco Seibert (Langen, Germany) and Florian Peter Schwarz (Aschaffenburg, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a diaphragm assembly of an aperture diaphragm for delimiting the coating region which is operative in the deposition of a layer and to a sputtering device which uses the diaphragm assembly. The diaphragm assembly comprises a main ...