ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,448,284, issued on Oct. 21, was assigned to Soitec (Bernin, France).
"Membrane transfer method" was invented by Francois-Xavier Darras (Bernin, France) and Bruno Ghyselen (Bernin, France).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for producing a device comprising a membrane of piezoelectric nature above at least one cavity comprises: a) providing a carrier substrate having a cavity opening out onto its front face, the cavity having a lateral dimension larger than 30 micro metre; b) providing a donor substrate having a buried weakened plane delimiting a surface layer; c) depositing, on the front face of the donor substrate, a stiffening laye...