ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,549,906, issued on Feb. 10, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).
"MEMS sensor with two compliances" was invented by Siarhei Dmitrievich Barsukou (Takarazuka, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric microelectromechanical systems microphone is provided comprising a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region having a first compliance, the first region having at least one piezoelectric layer and at least one electrode, and a second region of the sensor, the second region being adjacent to the first region, having at le...