US Patent Issued to Skyworks Solutions on Dec. 9 for "Method of making mems microphone with an anchor" (California Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,495,260, issued on Dec. 9, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).

"Method of making mems microphone with an anchor" was invented by Guofeng Chen (Fremont, Calif.) and Yu Hui (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a microelectromechanical systems (MEMS) microphone comprises depositing a membrane on a first sacrificial layer, wherein the first sacrificial layer is deposited on a substrate, etching the substrate to define a cavity, releasing the membrane by removing at least the first sacrificial layer, and forming at least one anchor at the edge of the membrane."

The patent was file...