ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,513,470, issued on Dec. 30, was assigned to Skyworks Solutions Inc. (Irvine, Calif.).
"Piezoelectric MEMS microphone with spring region" was invented by Guofeng Chen (Fremont, Calif.), You Qian (Singapore), Rakesh Kumar (Singapore), Michael Jon Wurtz (Lake Oswego, Ore.) and Humberto Campanella-Pineda (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric microelectromechanical systems microphone is provided comprising a substrate including at least one wall defining a cavity, the at least one wall defining an anchor region around a perimeter, a piezoelectric film layer forming a membrane, the piezoelectric film layer being supported a...