ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,395,798, issued on Aug. 19, was assigned to Skyworks Global Pte. Ltd. (Singapore).
"Method of making a piezoelectric MEMS diaphragm microphone" was invented by Yu Hui (Merced, Calif.) and Kwang Jae Shin (Yongin, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric microelectromechanical systems diaphragm microphone can be mounted on a printed circuit board. The microphone can include a substrate with an opening between a bottom end of the substrate and a top end of the substrate. The microphone can have two or more piezoelectric film layers disposed over the top end of the substrate and defining a diaphragm structure. Each of the t...