US Patent Issued to SK SILTRON on Oct. 21 for "Wax coating apparatus for wafer mounting and wafer mounting apparatus including same" (South Korean Inventor)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,378, issued on Oct. 21, was assigned to SK SILTRON Co. LTD. (Gumi-si, South Korea).

"Wax coating apparatus for wafer mounting and wafer mounting apparatus including same" was invented by Kwang Nyeong Jang (Gumi-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wax coating apparatus for wafer mounting of the embodiment includes: a vacuum chuck in which a vacuum flow path providing vacuum pressure is embedded; a heating plate mounted on an upper side of the vacuum chuck and having holes and grooves connected to the vacuum flow path of the vacuum chuck in order to suck a block to which a wafer is adhered; a rotating shaft connected to a ...