US Patent Issued to SK keyfoundry on April 29 for "Method of manufacturing a trench capacitor with wafer bow" (South Korean Inventor)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,648, issued on April 29, was assigned to SK keyfoundry Inc. (Cheongju-si, South Korea).

"Method of manufacturing a trench capacitor with wafer bow" was invented by Seung Mo Jo (Cheongju-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A trench capacitor manufacturing method is provided. The method includes forming a deep trench in a wafer, forming a trench capacitor structure including a plurality of dielectric films and a plurality of conductive layers in the deep trench; determining if the wafer has a tensile stress based on the forming of the trench capacitor structure; performing a high temperature heat treatment to the trench capac...