ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,177, issued on April 15, was assigned to SK keyfoundry Inc. (Cheongju-si, South Korea).
"Semiconductor device manufacturing method" was invented by Jeong Geun Bak (Cheongju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a semiconductor device is provided. The method includes depositing a first interconnect metal layer on a substrate; depositing a first barrier metal layer on the first interconnect metal layer; depositing a first dielectric layer on the first barrier metal layer; depositing a second barrier metal layer on the first dielectric layer; etching the second barrier metal layer to form a MIM capacito...