ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,445,107, issued on Oct. 14, was assigned to SiTime Corp. (Santa Clara, Calif.).
"Non-lid-bonded MEMS resonator with phosphorus dopant" was invented by Charles I. Grosjean (Los Gatos, Calif.), Ginel C. Hill (Sunnyvale, Calif.), Paul M. Hagelin (Saratoga, Calif.), Renata Melamud Berger (Palo Alto, Calif.), Aaron Partridge (Cupertino, Calif.) and Markus Lutz (Mountain View, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. ...