ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,212,304, issued on Jan. 28, was assigned to SiTime Corp. (Santa Clara, Calif.).
"Resonator electrode shields" was invented by David Raymond Pedersen (Portland, Ore.), Aaron Partridge (Cupertino, Calif.) and Thor Juneau (Menlo Park, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing sign...