ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,120, issued on Dec. 9, was assigned to SiTime Corp. (Sunnyvale, Calif.).
"MEMS resonator" was invented by Charles I. Grosjean (Los Gatos, Calif.), Nicholas Miller (Sunnyvale, Calif.), Paul M. Hagelin (Saratoga, Calif.), Ginel C. Hill (Sunnyvale, Calif.) and Joseph C. Doll (Mountain View, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency."
The patent was filed on April 3, 2024, under Application No. 18/625,857.
*For further information, including images, charts and tables, please visit: http://...