US Patent Issued to SHINKO ELECTRIC INDUSTRIES on Sept. 23 for "Electrostatic chuck, substrate fixing device and paste" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,476, issued on Sept. 23, was assigned to SHINKO ELECTRIC INDUSTRIES Co. LTD. (Nagano, Japan).

"Electrostatic chuck, substrate fixing device and paste" was invented by Michio Horiuchi (Nagano, Japan) and Ryosuke Hori (Nagano, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes a base body, and an electrostatic electrode embedded in the base body. The base body is a ceramic. The electrostatic electrode has TixOy, which is an oxide of titanium, as a main component, and an atomic ratio y/x is less than 1.7."

The patent was filed on July 31, 2023, under Application No. 18/362,367.

*For further information, including im...