ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,275, issued on Nov. 18, was assigned to SHIN-ETSU HANDOTAI Co. LTD. (Tokyo).
"Inspection apparatus and inspection method" was invented by Yoichi Karaki (Chikuma, Japan) and Shinnosuke Ichikawa (Chikuma, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention is an inspection apparatus for inspecting a container including a light-transmittable transparent portion and configured to house a wafer, the apparatus including: a flat lamp provided to irradiate a portion to be inspected including at least a part of the transparent portion of the container with light; and a camera provided to face the flat lamp across the portion to be insp...