ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,854, issued on Oct. 21, was assigned to SHIN-ETSU CHEMICAL Co. LTD. (Tokyo).
"Method for manufacturing composite substrate" was invented by Shoji Akiyama (Gunma, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A composite substrate capable of improving temperature characteristics while suppressing crack generation and a method for manufacturing such composite substrate is provided. The method for manufacturing composite substrates includes: a step of preparing a piezoelectric material substrate having a rough surface; a step of removing the damaged layer by etching the rough surface of the piezoelectric material substrate using a chemical proce...