ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,804, issued on Dec. 30, was assigned to SHIN-ETSU CHEMICAL Co. LTD. (Tokyo).
"Method for manufacturing composite substrate provided with piezoelectric single crystal film" was invented by Kazutoshi Nagata (Annaka, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method of manufacturing a composite substrate equipped with a piezoelectric single-crystal film having good film-thickness uniformity and not causing deterioration in properties even if ion implantation is performed. The method of manufacturing a composite substrate 10 equipped with a piezoelectric single-crystal film 11 according to the present invention includes the steps...