ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,854, issued on July 8, was assigned to SHIBAURA MECHATRONICS Corp. (Yokohama, Japan).
"Film formation apparatus" was invented by Hisashi Nishigaki (Yokohama, Japan) and Koji Yoshimura (Yokohama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to one embodiment, a film formation apparatus that suppresses effects of pre-processing and enables stable film formation is provided. A film formation apparatus of the present disclosure includes a chamber that can be made vacuum, a transporter that is provided inside the chamber and that circulates and transports a workpiece in a trajectory of a circle, a film formation unit that forms film by s...