ALEXANDRIA, Va., July 23 -- United States Patent no. 12,365,976, issued on July 22, was assigned to Shibaura Mechatronics Corp. (Yokohama, Japan).
"Film forming apparatus" was invented by Shigeki Matsunaka (Yokohama, Japan), Ivan Petrov Ganachev (Hiratsuka, Japan), Yoji Takizawa (Yokohama, Japan) and Hiroshi Ootsuka (Yokohama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming apparatus includes: a rotary table provided in a chamber; a processing unit configured to perform plasma processing on a workpiece transferred by the rotary table; an inner wall configured to define a processing space and having an opening facing the rotary table; an outer wall configured to cover a periphery of the in...