US Patent Issued to Shanghai Huali Microelectronics on May 13 for "Method for automatically detecting wafer backside brightfield image anomaly" (Chinese Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,299,866, issued on May 13, was assigned to Shanghai Huali Microelectronics Corp. (Shanghai).

"Method for automatically detecting wafer backside brightfield image anomaly" was invented by Junjun Zhuang (Shanghai), Xu Chen (Shanghai), Yansheng Wang (Shanghai) and Zhengying Wei (Shanghai).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present application provides a method for automatically detecting a wafer backside brightfield image anomaly, at least comprising: processing wafer backside brightfield images by means of histogram equalization, so as to obtain processed images; compiling statistics for a gray histogram of the processed images; calculating...