ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,532,704, issued on Jan. 20, was assigned to Service Support Specialties Inc..
"Wafer detection system" was invented by Gary Hillman (Livingston, N.J.) and Rodrigo Nogueira (New York).
According to the abstract* released by the U.S. Patent & Trademark Office: "A system for detecting the presence of a wafer on a wafer handling robot. The system includes a robot having an end effector with a ledge portion having an opening; a vacuum pump; a conduit fluidly coupling the vacuum pump to the opening in the ledge portion; a pressure sensor located along the conduit to determine whether a measured pressure is within a target pressure range; and a wafer configured to be supported by the at lea...