US Patent Issued to SEMICONDUCTOR COMPONENTS INDUSTRIES on March 4 for "Self-aligned semiconductor device contacts having widths less than minimum lithography limits" (Japanese Inventors)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,243,778, issued on March 4, was assigned to SEMICONDUCTOR COMPONENTS INDUSTRIES LLC (Scottsdale, Ariz.).

"Self-aligned semiconductor device contacts having widths less than minimum lithography limits" was invented by Mitsuru Soma (Higashimatsuyama, Japan), Masahiro Shimbo (Ojiya, Japan), Masaki Kuramae (Aizuwakamatsu, Japan) and Kouhei Uchida (Aizu-wakamatsu, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor devices made by forming hard mask pillars on a surface of a substrate, forming sacrificial spacers on a first side of each hard mask pillar and a second side of each hard mask pillar. The open gaps may be formed between adjacent sac...