ALEXANDRIA, Va., April 9 -- United States Patent no. 12,272,654, issued on April 8, was assigned to SEMICONDUCTOR COMPONENTS INDUSTRIES LLC (Scottsdale, Ariz.).
"Method and system for fabricating fiducials using selective area growth" was invented by Clifford Drowley (Santa Clara, Calif.), Ray Milano (Santa Clara, Calif.), Robert Routh (Santa Clara, Calif.), Subhash Srinivas Pidaparthi (Santa Clara, Calif.) and Andrew P. Edwards (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming alignment marks includes providing a III-V compound substrate having a device region and an alignment mark region, forming a hardmask layer having a first set of openings on the alignment mark reg...