ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,084, issued on May 20, was assigned to SEMIBOOSTER Co. LTD. (Gyeongsangbuk-do, South Korea).
"Method for analyzing silicon concentration in phosphoric acid solution" was invented by Seung Hun Lee (Daegu, South Korea) and Seung Hyun Lee (Daegu, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a method of determining the concentration of silicon based on the solubility of silicon in a phosphoric acid solution to determine the concentration of silicon generated in the process of etching silicon nitride. The silicon concentration determination method can determine the concentration of only the silicon that is g...