US Patent Issued to SEMES on Sept. 9 for "Shutter apparatus and substrate treating apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,427, issued on Sept. 9, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Shutter apparatus and substrate treating apparatus including the same" was invented by Wan Ho Do (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a process chamber having an opening, a shutter that opens and closes the opening through a rotation thereof, and a shutter driver having a cylinder that opens and closes the shutter, and the shutter driver includes a controller that controls a pneumatic pressure provided to the cylinder such that, when the sh...