US Patent Issued to SEMES on Sept. 9 for "Apparatus for wafer placement teaching and method for wafer placement teaching using the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,411,003, issued on Sept. 9, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Apparatus for wafer placement teaching and method for wafer placement teaching using the same" was invented by Chung Woo Lee (Suwon-si, South Korea), Tae Dong Park (Hwaseong-si, South Korea), Chang Jun Park (Pyeongtaek-si, South Korea) and Jin Hwan Kim (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are a wafer position detection apparatus and a wafer position detection and correction method using the same. More specifically, proposed is an apparatus for wafer placement teaching for adjusting a position of a wafer disposed on an elec...