US Patent Issued to SEMES on Sept. 9 for "Apparatus for treating substrate and method for treating substrate" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,767, issued on Sept. 9, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Apparatus for treating substrate and method for treating substrate" was invented by Gui Su Park (Chungcheongnam-do, South Korea), Jun Young Choi (Chungcheongbuk-do, South Korea), Young Jin Jang (Chungcheongnam-do, South Korea), Yong Sun Ko (Gyeonggi-do, South Korea), Kyu Hwan Chang (Chungcheongnam-do, South Korea) and Jun Hyun Lim (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a first process treating unit configured to treat a substrate...