ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,431,347, issued on Sept. 30, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Method for treating substrate" was invented by Jinwoo Jung (Seoul, South Korea), Young Hun Lee (Cheonan-si, South Korea), Yong Hee Lee (Cheonan-si, South Korea) and Eui Sang Lim (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for treating a substrate is provided. The method includes the following steps: performing a process of treating the substrate by dispensing a supercritical fluid onto the substrate. A treating fluid flows through a treating fluid supplying regulator regulating an amount of the treating fluid before dispen...