ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,429,283, issued on Sept. 30, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).
"Method and apparatus for treating a substrate" was invented by Hae-Won Choi (Daejeon, South Korea), Anton Koriakin (Cheonan-si, South Korea), Joon Ho Won (Suwon-si, South Korea), Min Woo Kim (Seoul, South Korea), Ki Hoon Choi (Cheonan-si, South Korea), Eung Su Kim (Yongin-si, South Korea), Tae Hee Kim (Yongin-si, South Korea), Pil Kyun Heo (Yongin-si, South Korea), Jang Jin Lee (Hwaseong-si, South Korea) and Jin Yeong Sung (Chungcheongbuk-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a method for treating a substrate. ...