ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,428,730, issued on Sept. 30, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for treating substrate" was invented by Ki Sang Eum (Cheonan-si, South Korea), Woo Ram Lee (Seoul, South Korea), Jong Wha Kang (Cheonan-si, South Korea) and Dong Woon Park (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate. The apparatus for treating the substrate includes a chamber having an inner space, a support unit configured to support the substrate in the inner space, a gas supply tube configured to supply a gas onto the substrate supported on the support unit, a gas exhaust tu...