US Patent Issued to SEMES on Sept. 2 for "Trap device and substrate processing apparatus comprising the same" (South Korean Inventor)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,403,696, issued on Sept. 2, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Trap device and substrate processing apparatus comprising the same" was invented by Jin Woo Yang (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a substrate processing apparatus capable of stably controlling a meniscus position. The substrate processing apparatus comprises a head unit configured to discharge a medical fluid; a reservoir configured to store the medical fluid and supply the medical fluid to the head unit; a pressure control unit configured to control pressure in the reservoir; and a trap un...