US Patent Issued to Semes on Sept. 2 for "Liquid chemical supply module and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,403,508, issued on Sept. 2, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Liquid chemical supply module and substrate processing apparatus including the same" was invented by Seungtae Yang (Yongin-si, South Korea), Sangwoo Park (Daejeon, South Korea), Youngjoon Han (Cheonan-si, South Korea), Seonghyeon Kim (Cheonan-si, South Korea) and Gi Hun Choi (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a liquid chemical supply module and a substrate processing apparatus including the same, the liquid chemical supply module including a main supplier for supplying a liquid chemical from a liquid chemical tank to at...