ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,934, issued on Sept. 16, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Substrate treating apparatus and substrate transfer robot" was invented by Do Hyeon Yoon (Cheonan-si, South Korea), Yong Hee Lee (Cheonan-si, South Korea), Jin Woo Jung (Cheonan-si, South Korea) and Mi So Park (Daejeon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a substrate treating apparatus. The substrate treating apparatus includes: a liquid treatment chamber configured to treat a substrate with a liquid; a drying chamber configured to dry the liquid-treated substrate; a transfer robot configured to transfer t...