US Patent Issued to SEMES on Sept. 16 for "Position measuring device and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,416,482, issued on Sept. 16, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Position measuring device and substrate processing apparatus including the same" was invented by Bo Ram Chan Sung (Anyang-si, South Korea), Dong Yun Lee (Cheonan-si, South Korea) and Eon Seok Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A position measuring device and a position measuring method for accurately measuring a position of a movable member using a plurality of linear scales are provided. The position measuring device comprises a first linear scale elongated in a first direction, a second linear scale elongated in the first d...