US Patent Issued to SEMES on Oct. 7 for "System for determining whether transfer robot is normal, method for determining whether transfer robot is normal, and substrate treating apparatus" (South Korean Inventor)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,027, issued on Oct. 7, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"System for determining whether transfer robot is normal, method for determining whether transfer robot is normal, and substrate treating apparatus" was invented by Hyun Jun Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus including a transfer chamber for transferring a substrate. The transfer chamber may include a hand on which the substrate is placed, an arm connected to the hand, a first member that supports the hand the arm and move to transfer the substrate, a second member that sup...