US Patent Issued to SEMES on Oct. 7 for "Substrate support unit, method of manufacturing the same, and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,028, issued on Oct. 7, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate support unit, method of manufacturing the same, and substrate processing apparatus including the same" was invented by Jun Seok Park (Cheonan-si, South Korea), Chul Ho Jung (Pyeongtaek-si, South Korea) and Sang Kee Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is a substrate support unit, a method of manufacturing the same, and a substrate processing apparatus including the same. The substrate support unit includes a base component, a chucking component mounted on the base component, and an intermediate layer interposed b...