US Patent Issued to SEMES on Oct. 7 for "Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same" (South Korean Inventor)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,032, issued on Oct. 7, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same" was invented by Cheol Hwan Jeong (Pyeongtaek-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chuck pin assembly includes a body member provided on a circumferential portion of a chuck supporting a substrate and configured to be movable with respect to the chuck, a grip member gripping a lateral portion of the substrate, and a rotational connection member rotatably coupling the grip member to the body member. As the grip member is rotatable, it is possible...