US Patent Issued to SEMES on Oct. 7 for "Apparatus for treating substrate and method for treating a substrate" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,463, issued on Oct. 7, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Apparatus for treating substrate and method for treating a substrate" was invented by Min Jung Park (Cheonan-si, South Korea), Soo Bin Yong (Cheonan-si, South Korea) and Jae Hoon Park (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating method. The substrate treating apparatus includes first treating including supplying a first liquid to a rotating substrate; and second treating including supplying a second liquid to the rotating substrate after the supplying of the first liquid, and wherein a...