ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,456,606, issued on Oct. 28, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Support unit and apparatus for treating substrate" was invented by Hyoungkyu Son (Seoul, South Korea), Jong-Hwan An (Gyeonggi-do, South Korea), Jae Hyun Cho (Gyeonggi-do, South Korea), Min Keun Bae (Chungcheongnam-do, South Korea), Ogsen Galstyan (Chungcheongnam-do, South Korea), Dong Suk Kim (Gyeonggi-do, South Korea), Hyeon Gyu Kim (Chungcheongnam-do, South Korea), Won Seok Lee (Seoul, South Korea) and Sung Je Kim (Gyeonggi-dO, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a support unit included in an apparatus for treating a substra...